Study on Ionized Degree of Ar Plasma in Capillary Discharge
Abstract: Ionized degree of Ar plasma in capillary discharge soft X-ray laser or Extreme Ultraviolet Lithographic (EUVL) source research was an important parameter which determined the wavelength of the plasma source. According to the characteristics of capillary discharge and the data from literature, we deduced an experiential expression of ion-ized degree of Ar plasma in capillary discharge by analogy method. With the first set of capillary discharge EUVL source demonstrative device in China, the spectra of Ar plasma was studied. It was found from experiment that either 30 Pa Ar gas discharged by peak pulse current of -28 kA or 40 Pa Ar gas discharged by peak pulse current of -34 kA could produce Ar7+ ion. While the simulating results showed that it was necessary for the 30 Pa and 40 Pa Ar gas to be ionized to Ar7+ ion by peak pulse current of 24.4 - 39 kA and 32.7 - 52.3 kA respectively. These results proved that the experien- tial expression had some definite practical significance.
文章引用: 张兴强 , 王骐 (2013) 毛细管放电氩等离子体的电离价研究。 现代物理， 3， 27-31. doi: 10.12677/MP.2013.31005
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