Influence of Annealing Temperature on Conductivity of ITO Films
Abstract: The relationship between conductivity of ITO films and heat treatment (RTA) temperature was researched by electron beam evaporation technology. The crystal structure and morphology were characterized by XRD and SEM measurements and electric properties were tested by Hall. The results indicated that the crystallinity of ITO film are obviously improved after annealing, crystalline phase chose preferential growth, the size of crystallite was bigger, the conductivity of film increased with the rise of annealing temperature at first, then decreased. The conductivity of film what had been annealed at 520˚C for 15 min was the biggest.
文章引用: 孟庆哲 , 方允樟 , 马 云 , 李文忠 , 金林峰 (2013) 退火温度对ITO薄膜电导率的影响。 材料科学， 3， 45-49. doi: 10.12677/MS.2013.31009
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