宽带多齿谐振光栅反射镜的研究
A High Efficient Reflector Utilized by a Subwavelength Multi-Subpart Profile Grating Structure

作者: 吴华明 * , 徐欢欢 , 马林飞 , 肖文波 , 段军红 :无损检测与光电传感技术及应用国家地方联合工程实验室、无损检测技术教育部重点实验室, 江西 南昌;江西省光电检测技术工程实验室、南昌航空大学测试与光电工程学院,江西 南昌; 肖永生 , 黄丽贞 :南昌航空大学信息工程学院,江西 南昌;

关键词: 衍射光栅泄露模谐振反射镜Diffraction Gratings Leaky Mode Resonance (LMR) Reflectors

摘要:
本文中,基于单层多齿光栅结构,我们设计、优化了一种高性能的谐振光栅反射镜。严格耦合波分析算法表明,对于TE偏振光,此结构在1.47~2.1 μm宽谱范围内,其0级反射率大于98.5% (R0 > 98.5%),在中心波长1.8 μm处,角度带宽约为28˚。另外,我们还分析了此器件的工艺容差性能。

Abstract: In this study, a high efficient reflector constructed by only a single layer subwavelength grating with multi-subpart profiles is addressed. The properties of the grating reflector are investigated by rigorous coupled-wave analysis. It is shown that for transverse electric (TE) polarized wave, over a broadband spectrum of 1.47 - 2.1 μm, the reflector demonstrates high reflectivity (R0 > 98.5%) and wide angular bandwidth (about 28˚) at 1.8 μm. Effects of deviation from the design parameters on the reflection spectra are also presented.

文章引用: 吴华明 , 徐欢欢 , 马林飞 , 肖永生 , 黄丽贞 , 肖文波 , 段军红 (2016) 宽带多齿谐振光栅反射镜的研究。 应用物理, 6, 167-174. doi: 10.12677/APP.2016.68022

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