Epitaxial Growth and Properties of ZnO/MgO(011)
Abstract: In this work, the growth behaviors of ZnO thin films on MgO (011) substrates were studied. ZnO films were deposited on MgO(110) substrates using oxygen plasma-assisted molecular beam epitaxy (MBE). Their surface mor- phologies were probed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Elemental con- stituents at different depths were also analyzed by X-ray photoelectron spectroscopy (XPS) and the optical properties of the ZnO films were characterized by transmission spectra. The film growth was found to follow a three-dimensional growth mode and the surface morphologies could be monitored by substrate temperature. The characteristic band gap of ZnO was found for all the films and the value was little influenced by the substrate temperature. In addition, the evolu- tion of the structure was examined by capturing in situ reflection high-energy electron diffraction (RHEED) patterns and ex situ AFM for different growth steps. During the growth of ZnO films, the Zn ions were found to diffuse into the MgO(110) substrate.
文章引用: 耿 伟 , 王惠琼 , 周华 , 杜达敏 , 杨闻操 , 陈嘉琪 , 陈晓航 , 詹华瀚 , 康俊勇 (2013) ZnO/MgO(011)的异质外延与特性。 现代物理， 3， 79-83. doi: 10.12677/MP.2013.33015
 S. Shionoya, W. M. Yen and H. Yamamoto. Phosphor handbook. Boca Raton: Taylor & Francis, 1999.
 C. Xu, X. Sun. Field emission from one-dimensional nanostruc- tured zinc oxide. International Jour-nal of Nanotechnology, 2004, 1(4): 452-463.
 M. W. Shin, R. J. Trew. GaN MESFETs for high-power and hi- gh-temperature micro-wave applications. Electronics Letters, 1995, 31(6): 498-500.
 F. Hamdani, A. E. Botchkarev, H. Tang, W. Kim and H. Morkoç. Effect of buffer layer and substrate surface polarity on the growth by molecular beam epitaxy of GaN on ZnO. Applied Physics Letters, 1997, 71(21): 3111-3113.
 冯怡, 袁忠勇. ZnO纳米结构制备及其器件研究[J]. 中国科技论文在线, 2009, 4(3): 157-168.
 H. Zhou, H.-Q. Wang, L. J. Wu, L. H. Zhang, K. Kisslinger, Y. M. Zhu, X. H. Chen, H. H. Zhan and J. Y. Kang. Wurtzite ZnO(001) films grown on cubic MgO(001) with bulk-like opto-electronic properties. Applied Physics Letters, 2011, 99(14): 141917 (1-3).
 H. Zhou, H.-Q. Wang, X.-X. Liao, Y. F. Zhang, J.-C. Zheng, J.-O. Wang, E. Muhemmed, H.-J. Qian, K. Ibra-him, X. H. Chen, H. H. Zhan and J. Y. Kang. Tailoring of polar and nonpolar ZnO planes on MgO(001) substrates through molecular beam epitaxy. Na- noscale Research Letters, 2012, 7 (1):184.
 R. F. C. Farrow, D. Weller, R. F. Marks, M. F. Toney, D. J. Smith and M. R. McCartney. Magnetic anisotropy and microstructure in molecular beam epitaxial FePt(110)/MgO(110). Journal of Applied Physics, 1998, 84(2): 934-939.
 B. Warota, E Snoecka, J. C. Ousseta, M. J. Casanovea, S. Dubourgb and J. F. Bobob. Surface morphology of NiO layers on MgO(001), MgO(110) and MgO(111). Applied Surface Sci-ence, 2002, 188: 151-155.
 M. Ohtake, Y. Nukaga, Y. Sato, F. Kirino and M. Futamoto. Epitaxial growth of fcc-CoXNi100−X thin films on MgO(110) sin- gle-crystal substrates. Journal of Applied Physics, 2009, 106(12): 123921.
 吴自勤. 薄膜生长[M]. 北京: 科学出版社, 2001.
 A. Setiawan, T. Yao. ZnO layers grown by plasma-assisted MBE. Germany: VDM Verlag Dr. Müller AG & Co. KG, 2011.
 刘永利, 刘欢, 李蔚, 赵骞, 祁阳. 衬底温度对ZnO薄膜生长过程和微结构的影响[J]. 物理化学报, 2013, 29(3): 631-638.
 S. A. Chambers, Epitaxial growth and properties of thin film oxides. Surface Science Reports, 2000, 39: 105.