Study on the Preparation and Properties of CoTaZr)x(Al2O3)1-x Soft Magnetic Nano-Granular Films
Abstract: A series of (CoTaZr)x(Al2O3)1−x (x = 0.23, 0.32, 0.43) magnetic granular films are prepared by RF magnetron sputtering. The effect of sputtering power and pressure on electromagnetic properties and microstructure are studied. Results show that higher sputtering power induces to higher resistivity. The properties first increase and then decrease with the pressure increasing. The better property has been obtained when the pressure is 2.5 Pa. The sample with higher volume fraction of magnetic particles has higher saturation magnetization but lower resistivity. When x = 0.32, the sample has better properties with the specific saturation magnetization of 56.8 emu/g and resistivity of 2.73 × 104 µΩcm. By SEM, it can be seen that Al2O3 particles distribute uniform among the magnetic particles.
文章引用: 吴金明 , 谢致薇 , 杨元政 , 陈先朝 , 何玉定 (2013) (CoTaZr)x(Al2O3)1-x软磁纳米颗粒膜的制备与性能研究。 材料科学， 3， 145-149. doi: 10.12677/MS.2013.33027
 F. F. Yang, S. S. Yan, M. X. Yu, et al. Enhanced high-frequency electromagnetic properties of FeCoB-SiO2/SiO2 multilayered granular films. Physica B: Condensed Matter, 2012, 407(7): 1108-1113.
 H. W. Chang, M. H. Wu, C. C. Hsieh, et al. High magnetic anisotropy field in CoZr thin films. IEEE Transactions on Magnetics, 2011, 47(10): 3924-3927.
 X. Xiong, Z. K. Feng, W. Y. Ren, et al. Soft magnetic and microwave characteristics of amorphous FeCoBNi-Al2O3 films deposited by RF magnetron co-sputtering. Journal of Alloys and Compounds, 2012, 514: 170-173.
 S. H. Ge, D. S. Yao, M. Yamaguchi, et al. Microstructure and magnetism of FeCo-SiO2 nano-granular films for high frequency application. Journal of Physics D: Applied Physics, 2007, 40(12): 3660-3664.
 C. Z. Wang, P. M. Zhang, L. B. Zheng, et al. Influence of annealing on microstructure and magnetic-transport of FeCo-Al2O3 nanogranular films. Thin Solid Films, 2008, 516(10): 3422- 3430.
 J. A. Fedotova. FeCoZr-Al2O3 granular nanocomposite films with tailored structural, electric, magnetotransport and magnetic properties. Advances in Nanoscale Magnetism, 2009, 122: 231- 267.
 N. D. Ha, B. C. Park, C. G. Kim, et al. Soft magnetic properties of Co69.9Fe20.5Al4.4O5.2 thin films. IEEE Transactions on Magnetics, 2004, 40(4): 2727-2729.
 W. D. Li, Y. Q. Sun, C. R. Sullivan, et al. High-frequency resistivity of soft magnetic granular films. IEEE Transactions on Magnetics, 2005, 41(10): 3283-3285.
 J. Jiang, Q. Ma, S. W. Bie, et al. Microwave electromagnetic properties of discontinuous CoFeB-SiO2 magnetic multilayer films. Journal of Inorganic Materials, 2008, 23(2): 277-280.
 Y. G. Ma, C. K. Ong. Soft magnetic properties and high frequency permeability in [CoAlO/oxide] multilayer films. Journal of Physics D: Applied Physics, 2007, 40(11): 3286-3291.