Vol.3 No.1 (January 2013)
Influence of Annealing Temperature on Conductivity of ITO Films
The relationship between conductivity of ITO films and heat treatment (RTA) temperature was researched by electron beam evaporation technology. The crystal structure and morphology were characterized by XRD and SEM measurements and electric properties were tested by Hall. The results indicated that the crystallinity of ITO film are obviously improved after annealing, crystalline phase chose preferential growth, the size of crystallite was bigger, the conductivity of film increased with the rise of annealing temperature at first, then decreased. The conductivity of film what had been annealed at 520˚C for 15 min was the biggest.
孟庆哲 , 方允樟 , 马 云 , 李文忠 , 金林峰 (2013) 退火温度对ITO薄膜电导率的影响。 材料科学， 3， 45-49. doi: 10.12677/MS.2013.31009
 D. V. Morgan, Y. H. Aliyu, R. W. Bunce and A. Salehi. Thin Solid Flims, 1998, 312: 268.
 M. Quaas, C. Eggs, M. L. Ma and H. Wulff. Structural studies of ITO thin films the Rietveld method. Thin Solid Flims, 1998, 332: 277-281.
 D. C. Paine, T. Whitson, D. Janiac, R. Bersford, C. O. Yang and B. Lewis. A study of low temperature crystallization of amor- phous thin film indium-tin-oxide. Journal of Applied Physics, 1999, 85(12): 8445.
 M. J. Alam, D. C. Cameron. Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel proc- ess. Thin Solid Films, 2000, 377-378: 455-459.
 H. Bisht, H. T. Eun, A. Mehrtens and M. A. Aegerter. Com- parison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrates. Thin Soild Films, 1999, 351(1-2): 109- 114.
 H. El Rhaleba, E. Benamar, M. Ramib, J. P. Rogerc, A. Hakama and A. Ennaouib. Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis. Applied Surface Science, 2002, 201(1-4): 138-145.
 H. R. Fallaha, M. Ghasemi and A. Hassanzadeh. Influence of heat treatment on structural, electrical impedance and optical properties of nanocrystalline ITO films grown on glass at room temperature prepared by electron beam evaporation. Physica E: Low-Dimensional Systems and Nanostructures, 2007, 39(1): 69- 74.
 S. M. Song, T. L. Yang, J. J. Liu, Y. Q. Xin, Y. H. Li and S. H. Han. Rapid thermal annealing of ITO films. Applied Surface Science, 2011, 257(16): 7061-7064.
 Y. S. Jung, J. Y. Seo, D. W. Lee and D. Y. Jeon. Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film. Thin Solid Films, 2003, 455(1): 63- 71.
 杨觉明, 余萍, 陈平, 张海礁, 许岗. 热处理对ITO薄膜的显微结构及光电特性的影响[J]. 西安工业学院学报, 2005, 1: 52- 55.
 岳锡华, 赵屹, 张维佳. ITO透明导电膜的制备及性能[J]. 航空学报, 1996, 1: 55-61.