Vol.6 No.1 (January 2016)
Effects of Sputtering Power on Properties of AZO Photoelectric Thin Films
Al-doped ZnO (AZO) thin film not only has high electrical conductivity, but also high optical trans-parence in the visible region. AZO has become a kind of important optical-electronic materials. Comparing with ITO thin films, AZO films have abundant resources, low price and low pollution to the environment, so it is hopeful for AZO films to replace the ITO films in the future. In this article, AZO thin films were deposited by using R.F magnetron sputtering method and the AZO target was sintered in our laboratory. The films were characterized by four-point probes, ultraviolet-visible light spectrophotometer, XRD, SEM. The influence of sputtering power on the morphology, electrical and optical properties of AZO films was studied. The results showed that as the sputtering power increases, the crystalline dimension increases, the crystal properties improve, and the electrical conductivity as well as the light transmittance decrease.
罗 帅 , 耿志挺 , 王美英 , 姜 玮 , 屠 节 (2016) 溅射功率对AZO透明导电薄膜的性能影响。 材料科学， 6， 53-58. doi: 10.12677/MS.2016.61007
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