材料科学

Vol.5 No.3 (May 2015)

用分子束外延法生长的立方相ZnxMg1-xO薄膜的性质研究
Investigation of Cubic ZnxMg1-xO Films Grown by Molecular Beam Epitaxy

 

作者:

王小丹 , 周 华 , 耿 伟 , 康煜堃 , 陈晓航 , 王惠琼 , 周颖慧 , 詹华瀚 , 康俊勇 :厦门大学物理系,福建省半导体材料及应用实验室,福建 厦门

 

关键词:

ZnxMg1-xO薄膜MgO衬底立方结构ZnxMg1-xO Film MgO Substrate Cubic Structure

 

摘要:

通过分子束外延(MBE)的技术, 在富镁条件下于立方结构的MgO(100)衬底上外延生长立方相的ZnxMg1−xO薄膜。用反射高能电子衍射(RHEED)和X射线衍射(XRD)的方法研究了薄膜的晶体结构,结果表明,薄膜结构为四方相。用硬X射线吸收谱(XAS)的方法研究薄膜的电子结构,用透射谱的方法研究了薄膜的带隙结构;研究表明,ZnxMg1−xO薄膜中x的值约为0.58。

The cubic ZnxMg1−xO films are prepared epitaxially on cubic MgO(100) substrates by Molecular Beam Epitaxy (MBE). The crystal structure is determined by Reflection High Energy Electron Di-fraction (RHEED) which indicates that the phase of the film is cubic structure, consistent with the observation of the X-ray diffraction (XRD) results. The electronic structure is studied by X-ray Ab-sorption Spectroscopy (XAS); the band-gap structure is demonstrated by transmission spectroscopy. It is indicated that the value of x in ZnxMg1−xO films is about 0.58.

文章引用:

王小丹 , 周 华 , 耿 伟 , 康煜堃 , 陈晓航 , 王惠琼 , 周颖慧 , 詹华瀚 , 康俊勇 (2015) 用分子束外延法生长的立方相ZnxMg1-xO薄膜的性质研究。 材料科学, 5, 79-84. doi: 10.12677/MS.2015.53011

 

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