Vol.3 No.3 (May 2013)
Study on the Preparation and Properties of CoTaZr)x(Al2O3)1-x Soft Magnetic Nano-Granular Films
A series of (CoTaZr)x(Al2O3)1−x (x = 0.23, 0.32, 0.43) magnetic granular films are prepared by RF magnetron sputtering. The effect of sputtering power and pressure on electromagnetic properties and microstructure are studied. Results show that higher sputtering power induces to higher resistivity. The properties first increase and then decrease with the pressure increasing. The better property has been obtained when the pressure is 2.5 Pa. The sample with higher volume fraction of magnetic particles has higher saturation magnetization but lower resistivity. When x = 0.32, the sample has better properties with the specific saturation magnetization of 56.8 emu/g and resistivity of 2.73 × 104 µΩcm. By SEM, it can be seen that Al2O3 particles distribute uniform among the magnetic particles.
吴金明 , 谢致薇 , 杨元政 , 陈先朝 , 何玉定 (2013) (CoTaZr)x(Al2O3)1-x软磁纳米颗粒膜的制备与性能研究。 材料科学， 3， 145-149. doi: 10.12677/MS.2013.33027
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